Vibration Assisted Nanopositioning

Background and Motivation

Nanopositioning (NP) stages are used for precise positioning in a wide range of nanotech processes. They can be constructed using flexure, magnetic, air or roller bearings but roller bearing NP stages are the most cost effective, and are currently the only commercially viable option for a growing number of long-range NP applications that must be performed in (ultra) high vacuum environments. However, RB-NP stages take 5-10 times longer than equivalent frictionless stages to settle to their target positions in point-to-point positioning motions due to so-called “pre-rolling friction.” This research investigates a novel approach to reducing friction in roller bearing NP stages by using high frequency vibration.

Highlights 

• A novel approach for reducing friction in roller bearing NP stages using high frequency vibration combined with active vibration control has been proposed; it is called vibration assisted nanopositioning (VAN).
• Preliminary work has shown the potential of VAN to provide model free and robust reduction of friction in roller bearing NP stages, with up to 64.8% improvement in settling time in point-to-point positioning demonstrated in experiments.
• Future work is focused on properly understanding the fundamentals of VAN in order to boost is performance and versatility

Related Publications/Patents

• Dong. X, Zhang, X., Okwudire, C.E., 2015, “ A Novel Approach for Reducing the Settling Time of Roller Bearing Nanopositioning Stages using High Frequency Vibration,” 2015 ASPE Annual Meeting, November 1-6, 2015, Austin, TX. (Winner of Best Oral Presentation Award at ASPE 2015) (pdf)
• Okwudire, C.E., Vibration Assisted Nanopositioning Stage. (Pending).
• Dong, X., Yoon, D., Okwudire, C.E., Flexure Augmented Roller Bearing Nanopositioning Stage (Pending)
  

Project Team and Collaborators

• Xin Dong (M.S.E. student, U-M)
• Xiaowen Zhang (Undergraduate student, U-M)

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